GRH1802 Dry Claw Vacuum Pump 1800 m³/h High-Speed Oil-Free Vacuum Pump for Semiconductor Manufacturing

GRH1802 Dry Claw Vacuum Pump — 1800 m³/h Oil-Free Industrial Solution

The GRH1802 is a high-performance dry claw vacuum pump from the GRH series, delivering 1800 m³/h pumping speed with ultimate pressure ≤0.5 Pa. Its oil-free claw mechanism makes it ideal for semiconductor, photovoltaic, and lithium battery manufacturing processes that demand contamination-free vacuum environments.

Key Features

• Oil-Free Claw Mechanism: No oil or working medium in pump chamber — ensures process cleanliness
• Permanent Magnet Synchronous Motor: Superior energy efficiency for lower operating costs
• Advanced Rotor Design: Enhanced dust exhaust capability for harsh process conditions
• Dust & Vapor Insensitive: Handles dust and water vapor in pumped gases reliably
• Compact & Integrated: Space-efficient design (935 * 420 * 795 mm, 472 kg)
• Full Protection: Comprehensive protection with strong adaptive control
• Low Vibration & Noise: Below 70 dB(A) at ultimate pressure
• Advanced Sealing System: Lip seal + labyrinth seal + nitrogen purge for oil-free vacuum
• Remote Monitoring: I/O and RS485 (Modbus) interface for remote control

Technical Specifications

Applications

• Semiconductor: Etch, Ion Implantation, CVD (ALD, PECVD, MOCVD, SACVD, RTP, HDP-CVD)
• Photovoltaic: Crystal growth furnaces, solar cell fabrication
• Lithium Battery: Cell vacuum drying, electrolyte filling, degassing